Influence of RF Bias on the Deposition of CrN Studied by OES.

Published in:

Advanced Engineering Materials, 2008, v. 10, n. 7, p. 628, doi. 10.1002/adem.200800053

By:

• Zhang, Z. G.;
• Rapaud, O.;
• Bonasso, N.;
• Mercs, D.;
• Dong, C.;
• Coddet, C.

Publication type:

Article