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Impact of Pulse Duration on the Properties of Laser Hyperdoped Black Silicon.
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- Advanced Photonics Research, 2024, v. 5, n. 6, p. 1, doi. 10.1002/adpr.202300281
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Improving the Processing Efficiency of Femtosecond Laser Sulfur Hyperdoping of Silicon by Diffractive Beam Shaping.
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- Journal of Laser Micro / Nanoengineering, 2023, v. 18, n. 2, p. 72, doi. 10.2961/jlmn.2023.02.2003
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- Article