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Chemically amplified resists based on polymer side-chain rearrangement or electrophilic crosslinking.
- Published in:
- Polymer Engineering & Science, 1992, v. 32, n. 20, p. 1471, doi. 10.1002/pen.760322005
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- Publication type:
- Article
Novel photoresist design based on electrophilic aromatic substitution.
- Published in:
- Polymer Engineering & Science, 1989, v. 29, n. 14, p. 960, doi. 10.1002/pen.760291415
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- Publication type:
- Article