High-Q trenched aluminum coplanar resonators with an ultrasonic edge microcutting for superconducting quantum devices.Published in:Scientific Reports, 2023, v. 13, n. 1, p. 1, doi. 10.1038/s41598-023-42332-6By:Zikiy, E. V.;Ivanov, A. I.;Smirnov, N. S.;Moskalev, D. O.;Polozov, V. I.;Matanin, A. R.;Malevannaya, E. I.;Echeistov, V. V.;Konstantinova, T. G.;Rodionov, I. A.Publication type:Article