Nitrogen doping of SiC thin films deposited by RF magnetron sputtering.Published in:Journal of Materials Science: Materials in Electronics, 2008, v. 19, n. 8/9, p. 835, doi. 10.1007/s10854-007-9487-yBy:Fraga, Mariana Amorim;Massi, Marcos;Oliveira, Ivo C.;Maciel, Homero S.;dos Santos Filho, Sebastião G.;Mansano, Ronaldo D.Publication type:Article