Works by Maıdanchuk, I. Yu.

Kinetics of Structural and Phase Transformations in Thin SiO_x Films in the Course of a Rapid Thermal Annealing.

Published in:

Semiconductors, 2005, v. 39, n. 10, p. 1197, doi. 10.1134/1.2085270

By:

• Dan'ko, V. A.;
• Indutnyı, I. Z.;
• Lysenko, V. S.;
• Maıdanchuk, I. Yu.;
• Min'ko, V. I.;
• Nazarov, A. N.;
• Tkachenko, A. S.;
• Shepelyavyı, P. E.

Publication type:

Article