Works by Lu, Sha


Results: 167
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    Make the impossible possible: use variable-shaped beam mask writers and curvilinear full-chip inverse lithography technology for 193i contacts/vias with mask-wafer co-optimization.

    Published in:
    Journal of Micro/Nanopatterning, Materials & Metrology (JM3), 2024, v. 23, n. 1, p. 11207, doi. 10.1117/1.JMM.23.1.011207
    By:
    • Pang, Linyong;
    • Lu, Sha;
    • Russell, Ezequiel Vidal;
    • Lu, Yang;
    • Lee, Michael;
    • Digaum, Jennefir;
    • Yang, Ming-Chuan;
    • Jeffrey Ungar, P.;
    • Pomerantsev, Michael;
    • Niewczas, Mariusz;
    • Wang, Kechang;
    • Su, Bo;
    • Meyer, Michael;
    • Fujimura, Aki
    Publication type:
    Article
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    Etiological, epidemiological, and clinical features of acute diarrhea in China.

    Published in:
    Nature Communications, 2021, v. 12, n. 1, p. 1, doi. 10.1038/s41467-021-22551-z
    By:
    • Wang, Li-Ping;
    • Zhou, Shi-Xia;
    • Wang, Xin;
    • Lu, Qing-Bin;
    • Shi, Lu-Sha;
    • Ren, Xiang;
    • Zhang, Hai-Yang;
    • Wang, Yi-Fei;
    • Lin, Sheng-Hong;
    • Zhang, Cui-Hong;
    • Geng, Meng-Jie;
    • Zhang, Xiao-Ai;
    • Li, Jun;
    • Zhao, Shi-Wen;
    • Yi, Zhi-Gang;
    • Chen, Xiao;
    • Yang, Zuo-Sen;
    • Meng, Lei;
    • Wang, Xin-Hua;
    • Liu, Ying-Le
    Publication type:
    Article
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    Dielectric properties and impedance spectroscopic study of (1−x)[0.90NaNbO<sub>3</sub>–0.10Bi(Mg<sub>0.5</sub>Ta<sub>0.5</sub>)O<sub>3</sub>]–x(Bi<sub>0.5</sub>Na<sub>0.5</sub>)<sub>0.7</sub>(Sr<sub>0.7</sub>La<sub>0.2</sub>)<sub>0.3</sub>Ti<sub>0.9</sub>Zr<sub>0.1</sub>O<sub>3</sub> ceramics

    Published in:
    Journal of Materials Science: Materials in Electronics, 2024, v. 35, n. 26, p. 1, doi. 10.1007/s10854-024-13474-8
    By:
    • Gao, Qin;
    • Zhao, Nianshun;
    • Wu, Jiale;
    • Yu, Qi;
    • Wang, Li;
    • Hu, Juan;
    • Lu, Sha;
    • Zheng, Xiaofan
    Publication type:
    Article
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