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Effect of Plasma Oxygen Content on the Size and Content of Silicon Nanoclusters in Amorphous SiOx Films Obtained with Plasma-Enhanced Chemical Vapor Deposition.
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- Symmetry (20738994), 2023, v. 15, n. 9, p. 1800, doi. 10.3390/sym15091800
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Investigations of Nanoscale Columnar Al x Ga 1-x N/AlN Heterostructures Grown on Silicon Substrates with Different Modifications of the Surface.
- Published in:
- Photonics, 2023, v. 10, n. 11, p. 1209, doi. 10.3390/photonics10111209
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- Article