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In Situ Modification and Analysis of the Composition and Crystal Structure of a Silicon Target by Ion-Beam Methods.
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- Technical Physics, 2018, v. 63, n. 12, p. 1861, doi. 10.1134/S106378421812023X
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- Article
Influence of the Charge State of Xenon Ions on the Depth Distribution Profile Upon Implantation into Silicon.
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- Semiconductors, 2019, v. 53, n. 8, p. 1011, doi. 10.1134/S1063782619080062
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- Article
Features of Defect Formation in Nanostructured Silicon under Ion Irradiation.
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- Semiconductors, 2019, v. 53, n. 6, p. 800, doi. 10.1134/S1063782619060095
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- Article