Metal-Insulator-Metal Single Electron Transistors with Tunnel Barriers Prepared by Atomic Layer Deposition.Published in:Applied Sciences (2076-3417), 2017, v. 7, n. 3, p. 246, doi. 10.3390/app7030246By:Karbasian, Golnaz;McConnell, Michael S.;George, Hubert;Schneider, Louisa C.;Filmer, Matthew J.;Orlov, Alexei O.;Nazarov, Alexei N.;Snider, Gregory L.Publication type:Article