Ultra-smooth platinum surfaces for nanoscale devices fabricated using chemical mechanical polishing.

Published in:

Applied Physics A: Materials Science & Processing, 2005, v. 80, n. 6, p. 1385, doi. 10.1007/s00339-004-3170-4

By:

• Islam, M. Saif;
• Jung, G.Y.;
• Ha, T.;
• Stewart, D.R.;
• Chen, Y.;
• Wang, S.Y.;
• Williams, R. Stanley

Publication type:

Article