Works by Hofmann, Mathias


Results: 20
    1

    APC for plasma etch.

    Published in:
    Solid State Technology, 2001, v. 44, n. 10, p. 71
    By:
    • Tegeder, Volker;
    • Ronchi, Robert;
    • Muezler, Sven;
    • Hofmann, Mathias
    Publication type:
    Article
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