Found: 15
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Integration of (Poly‐Si/Air)<sup>n</sup> Distributed Bragg Reflectors in a 150 mm Bulk Micromachined Wafer‐Level MOEMS Fabrication Process.
- Published in:
- IEEJ Transactions on Electrical & Electronic Engineering, 2024, v. 19, n. 5, p. 767, doi. 10.1002/tee.23960
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- Article
Characterization of Thin AlN/Ag/AlN-Reflector Stacks on Glass Substrates for MEMS Applications.
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- Micro (2673-8023), 2024, v. 4, n. 1, p. 142, doi. 10.3390/micro4010010
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- Article
Inductive Sintering of Silver Micro Particles for Bonding of Microelectronic Components.
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- Electronics (2079-9292), 2023, v. 12, n. 15, p. 3247, doi. 10.3390/electronics12153247
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- Article
Design and characterization of a pyroelectric detector based on three-dimensional structured hafnium oxide thin films.
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- Optical Engineering, 2022, v. 61, n. 2, p. 127102, doi. 10.1117/1.OE.61.12.127102
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- Article
Localized Induction Heating of Cu-Sn Layers for Rapid Solid-Liquid Interdiffusion Bonding Based on Miniaturized Coils.
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- Micromachines, 2022, v. 13, n. 8, p. 1307, doi. 10.3390/mi13081307
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- Article
Static High Voltage Actuation of Piezoelectric AlN and AlScN Based Scanning Micromirrors.
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- Micromachines, 2022, v. 13, n. 4, p. N.PAG, doi. 10.3390/mi13040625
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- Article
Correction to: Co-sputtering of Al1−xScxN thin films on Pt(111): a characterization by Raman and IR spectroscopies.
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- 2021
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- Correction Notice
Co-sputtering of Al1-xScxN thin films on Pt(111): a characterization by Raman and IR spectroscopies.
- Published in:
- Journal of Materials Science, 2020, v. 55, n. 36, p. 17061, doi. 10.1007/s10853-020-05244-8
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- Article
2D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based on Piezoelectric Thin Film Aluminum Nitride.
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- Sensors (14248220), 2020, v. 20, n. 22, p. 6599, doi. 10.3390/s20226599
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- Article
The Limits of the Post‐Growth Optimization of AlN Thin Films Grown on Si(111) via Magnetron Sputtering.
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- Physica Status Solidi (B), 2020, v. 257, n. 5, p. 1, doi. 10.1002/pssb.201900400
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- Article
Nanomechanical Characterization of Vertical Nanopillars Using an MEMS-SPM Nano-Bending Testing Platform.
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- Sensors (14248220), 2019, v. 19, n. 20, p. 4529, doi. 10.3390/s19204529
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- Article
Design, Modeling, Fabrication, and Verification of New Multifunctional MEMS/NEMS Components.
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- Physica Status Solidi. A: Applications & Materials Science, 2019, v. 216, n. 19, p. N.PAG, doi. 10.1002/pssa.201800831
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- Article
Highly Miniaturized MEMS‐Based Test Platforms for Thermo‐Mechanical and Reliability Characterization of Nano‐Functional Elements − Technology and Functional Test Results.
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- Physica Status Solidi. A: Applications & Materials Science, 2019, v. 216, n. 19, p. N.PAG, doi. 10.1002/pssa.201800936
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- Article
Sensoric Micro and Nano Systems.
- Published in:
- Physica Status Solidi. A: Applications & Materials Science, 2019, v. 216, n. 19, p. N.PAG, doi. 10.1002/pssa.201900733
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- Article
Integrated Microsystems for Smart Applications.
- Published in:
- Sensors & Materials, 2018, v. 30, n. 4, Part 1, p. 767, doi. 10.18494/SAM.2018.1797
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- Publication type:
- Article