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Atomic Layer Deposition of Epitaxial Ferroelectric Hf<sub>0.5</sub>Zr<sub>0.5</sub>O<sub>2</sub> Thin Films.
- Published in:
- Advanced Functional Materials, 2024, v. 34, n. 24, p. 1, doi. 10.1002/adfm.202314396
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- Article