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Data-driven modeling and control of an X-ray bimorph adaptive mirror.
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- Journal of Synchrotron Radiation, 2023, v. 30, n. 1, p. 57, doi. 10.1107/S1600577522011080
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- Article
Extreme ultraviolet microscope characterization using photomask surface roughness.
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- Scientific Reports, 2020, v. 10, n. 1, p. 1, doi. 10.1038/s41598-020-68588-w
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- Article