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Analytical TEM Characterization of Source/Drain Contacts in Advanced Semiconductor Devices.
Published in:
Microscopy & Microanalysis, 2019, p. 8, doi. 10.1017/S1431927618000533
By:
- Li, J.;
- Niimi, H.;
- Gluschenkov, O.;
- Adusumilli, P.;
- Fronheiser, J.;
- Mochizuki, S.;
- Liu, Z.;
- Kamineni, V.;
- Raymond, M.;
- Carr, A. V;
- Yamashita, T.;
- Veeraraghavan, B.;
- Saulnier, N.;
- Gaudiello, J.
Publication type:
Article
Analytical TEM Characterization of Source/Drain Contacts in Advanced Semiconductor Devices.
Published in:
2018
By:
- Li, J.;
- Niimi, H.;
- Gluschenkov, O.;
- Adusumilli, P.;
- Fronheiser, J.;
- Mochizuki, S.;
- Liu, Z.;
- Kamineni, V.;
- Raymond, M.;
- Carr, A. V;
- Yamashita, T.;
- Veeraraghavan, B.;
- Saulnier, N.;
- Gaudiello, J.
Publication type:
Abstract