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Synthesis of Hydrogenated Silicon Oxycarbonitride from a Gas Mixture of Methyltris(Diethylamino)Silane, Nitrogen, and Oxygen.
Published in:
Glass Physics & Chemistry, 2018, v. 44, n. 6, p. 607, doi. 10.1134/S1087659618060056
By:
- Fainer, N. I.;
- Plekhanov, A. G.;
- Maksimovsky, E. A.;
- Rumyantsev, Yu. M.
Publication type:
Article
Plasma-chemical synthesis of silicon carbonitride films from trimethyl(diethylamino)silane.
Published in:
Glass Physics & Chemistry, 2010, v. 36, n. 4, p. 497, doi. 10.1134/S1087659610040152
By:
- Kosinova, M. L.;
- Rumyantsev, Yu. M.;
- Chernyavskii, L. I.;
- Nikulina, L. D.;
- Kesler, V. G.;
- Maximovskii, E. A.;
- Fainer, N. I.;
- Rakhlin, V. I.;
- Voronkov, M. G.;
- Kuznetsov, F. A.
Publication type:
Article
Use of hexamethylcyclotrisilazane for preparation of transparent films of complex compositions.
Published in:
Glass Physics & Chemistry, 2009, v. 35, n. 3, p. 274, doi. 10.1134/S1087659609030067
By:
- Fainer, N. I.;
- Golubenko, A. N.;
- Rumyantsev, Yu. M.;
- Maximovskii, E. A.
Publication type:
Article
SYNTHESIS OF MAGNETIC NANOCOMPOSITE FILMS SiCxNyFez BY PLASMA-ENHANCED CHEMICAL DECOMPOSITION OF A GASEOUS MIXTURE OF 1,1,1,3,3,3-HEXAMETHYLDISILAZANE, FERROCENE, AND HELIUM.
Published in:
Journal of Structural Chemistry, 2020, v. 61, n. 12, p. 1865, doi. 10.1134/S0022476620120045
By:
- Fainer, N. I.;
- Plekhanov, A. G.;
- Pushkarev, R. V.;
- Shayapov, V. R.;
- Maksimovskiy, E. A.;
- Nadolinny, V. A.;
- Korotaev, E. V.;
- Kaichev, V. V.
Publication type:
Article
Physicochemical Properties and Structure of SiCxNy:Fe Films Grown From a Gas Mixture of Ferrocene, Hydrogen and 1,1,3,3,5,5-Hexamethylcyclotrisilazane.
Published in:
Journal of Structural Chemistry, 2018, v. 59, n. 7, p. 1588, doi. 10.1134/S0022476618070107
By:
- Fainer, N. I.;
- Pushkarev, R. V.;
- Ehrenburg, S. B.;
- Trubina, S. V.;
- Shestakov, V. A.;
- Merenkov, I. S.;
- Terauchi, M.
Publication type:
Article
Effect of synthesis conditions on the structure and properties of new SiC<italic>x</italic>N<italic>y</italic>M<italic>z</italic> materials for spintronics.
Published in:
Journal of Structural Chemistry, 2017, v. 58, n. 8, p. 1493, doi. 10.1134/S0022476617080030
By:
- Fainer, N. I.;
- Pushkarev, R. V.;
- Shestakov, V. A.;
- Gutakovskii, A. K.
Publication type:
Article
Synthesis of Highly Transparent SiCxNyOz:H Films via Plasma-Chemical Decomposition of 1,1,3,3,5,5-Hexamethylcyclotrisilazane, Oxygen, and Nitrogen Gas Mixture.
Published in:
Russian Journal of General Chemistry, 2019, v. 89, n. 11, p. 2290, doi. 10.1134/S1070363219110203
By:
- Plekhanov, A. G.;
- Fainer, N. I.;
- Maksimovskiy, E. A.;
- Shayapov, V. R.;
- Yushina, I. V.;
- Khomyakov, M. N.
Publication type:
Article
Properties of BC xN y films grown by plasma-enhanced chemical vapor deposition from N-trimethylborazine-nitrogen mixtures.
Published in:
Inorganic Materials, 2010, v. 46, n. 5, p. 487, doi. 10.1134/S0020168510050092
By:
- Sulyaeva, V. S.;
- Kosinova, M. L.;
- Rumyantsev, Yu. M.;
- Golubenko, A. N.;
- Fainer, N. I.;
- Alferova, N. I.;
- Ayupov, B. M.;
- Gevko, P. N.;
- Kesler, V. G.;
- Kolesov, B. A.;
- Maksimovskii, E. A.;
- Myakishev, K. G.;
- Yushina, I. V.;
- Kuznetsov, F. A.
Publication type:
Article
Thermodynamic modeling of BC xN y chemical vapor deposition from mixtures of N-trimethylborazine and nitrogen.
Published in:
Inorganic Materials, 2009, v. 45, n. 12, p. 1342, doi. 10.1134/S0020168509120061
By:
- Golubenko, A. N.;
- Kosinova, M. L.;
- Sulyaeva, V. S.;
- Rumyantsev, Yu. M.;
- Fainer, N. I.;
- Kuznetsov, F. A.
Publication type:
Article
Chemical Composition of Boron Carbonitride Films Grown by Plasma-Enhanced Chemical Vapor Deposition from Trimethylamineborane.
Published in:
Inorganic Materials, 2003, v. 39, n. 4, p. 366, doi. 10.1023/A:1023227716045
By:
- Kosinova, M. L.;
- Rumyantsev, Yu. M.;
- Golubenko, A. N.;
- Fainer, N. I.;
- Ayupov, B. M.;
- Dolgovesova, I. P.;
- Kolesov, B. A.;
- Kaichev, V. V.;
- Kuznetsov, F. A.
Publication type:
Article

Found: 10

Synthesis of Hydrogenated Silicon Oxycarbonitride from a Gas Mixture of Methyltris(Diethylamino)Silane, Nitrogen, and Oxygen.

Plasma-chemical synthesis of silicon carbonitride films from trimethyl(diethylamino)silane.

Use of hexamethylcyclotrisilazane for preparation of transparent films of complex compositions.

SYNTHESIS OF MAGNETIC NANOCOMPOSITE FILMS SiCxNyFez BY PLASMA-ENHANCED CHEMICAL DECOMPOSITION OF A GASEOUS MIXTURE OF 1,1,1,3,3,3-HEXAMETHYLDISILAZANE, FERROCENE, AND HELIUM.

Physicochemical Properties and Structure of SiC<sub>x</sub>N<sub>y</sub>:Fe Films Grown From a Gas Mixture of Ferrocene, Hydrogen and 1,1,3,3,5,5-Hexamethylcyclotrisilazane.

Effect of synthesis conditions on the structure and properties of new SiC<sub><italic>x</italic></sub>N<sub><italic>y</italic></sub>M<sub><italic>z</italic></sub> materials for spintronics.

Synthesis of Highly Transparent SiCxNyOz:H Films via Plasma-Chemical Decomposition of 1,1,3,3,5,5-Hexamethylcyclotrisilazane, Oxygen, and Nitrogen Gas Mixture.

Properties of BC<sub> x</sub>N<sub> y</sub> films grown by plasma-enhanced chemical vapor deposition from N-trimethylborazine-nitrogen mixtures.

Thermodynamic modeling of BC<sub> x</sub>N<sub> y</sub> chemical vapor deposition from mixtures of N-trimethylborazine and nitrogen.

Chemical Composition of Boron Carbonitride Films Grown by Plasma-Enhanced Chemical Vapor Deposition from Trimethylamineborane.