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Combining thermal scanning probe lithography and dry etching for grayscale nanopattern amplification.
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- Microsystems & Nanoengineering, 2024, v. 10, n. 1, p. 1, doi. 10.1038/s41378-024-00655-y
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- Article
Mechanical properties of fullerene embedded silicon nanowires.
- Published in:
- Archive of Applied Mechanics, 2023, v. 93, n. 1, p. 355, doi. 10.1007/s00419-022-02151-z
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- Publication type:
- Article