Thickness and coverage determination of multilayer with an island-like overlayer by hard X-ray photoelectron spectroscopy at multiple photon energies.

Published in:

Surface & Interface Analysis: SIA, 2015, v. 47, n. 2, p. 265, doi. 10.1002/sia.5701

By:

• Isomura, N.;
• Kataoka, K.;
• Horibuchi, K.;
• Dohmae, K.;
• Oji, H.;
• Cui, Y.‐T.;
• Son, J.‐Y.;
• Kitazumi, K.;
• Takahashi, N.;
• Kimoto, Y.

Publication type:

Article