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Structural and Stress Properties of AlGaN Epilayers Grown on AlN-Nanopatterned Sapphire Templates by Hydride Vapor Phase Epitaxy.
- Published in:
- Nanomaterials (2079-4991), 2018, v. 8, n. 9, p. 704, doi. 10.3390/nano8090704
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Comparison of Erosion Behavior and Particle Contamination in Mass-Production CF<sub>4</sub>/O<sub>2</sub> Plasma Chambers Using Y<sub>2</sub>O<sub>3</sub> and YF<sub>3</sub> Protective Coatings.
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- Nanomaterials (2079-4991), 2017, v. 7, n. 7, p. 183, doi. 10.3390/nano7070183
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- Article
Reduction of Defects in AlGaN Grown on Nanoscale-Patterned Sapphire Substrates by Hydride Vapor Phase Epitaxy.
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- Materials (1996-1944), 2017, v. 10, n. 6, p. 605, doi. 10.3390/ma10060605
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- Article