Plasma-Enhanced Chemical Vapor Deposition of Silicon Films at Low Pressure in GEC Reference Cell.
- Published in:
- Plasma Physics Reports, 2020, v. 46, n. 6, p. 667, doi. 10.1134/S1063780X20060094
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- Publication type:
- Article
Works by Bouanaka, F.
Results: 2
1
2
Effect of Secondary Electron Emission on Argon Glow Discharge Characteristics.
- Published in:
- International Review of Physics, 2013, v. 7, n. 1, p. 81
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- Publication type:
- Article