Works by Boroch, R.

Characterization of strength properties of thin polycrystalline silicon films for MEMS applications.

Published in:

Fatigue & Fracture of Engineering Materials & Structures, 2007, v. 30, n. 1, p. 2, doi. 10.1111/j.1460-2695.2006.01055.x

By:

• Boroch, R.;
• Wiaranowski, J.;
• Mueller-Fiedler, R.;
• Ebert, M.;
• Bagdahn, J.

Publication type:

Article