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A Low-g MEMS Accelerometer with High Sensitivity, Low Nonlinearity and Large Dynamic Range Based on Mode-Localization of 3-DoF Weakly Coupled Resonators.
- Published in:
- Micromachines, 2021, v. 12, n. 3, p. 310, doi. 10.3390/mi12030310
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- Article
Thermal Actuation Based 3-DoF Non-Resonant Microgyroscope Using MetalMUMPs.
- Published in:
- Sensors (14248220), 2009, v. 9, n. 4, p. 2389, doi. 10.3390/s90402389
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- Publication type:
- Article