Works by Börner, Martin


Results: 18
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    Stabilizing high aspect ratio x-ray gratings with top layer resist grid.

    Published in:
    Journal of Micro/Nanopatterning, Materials & Metrology (JM3), 2024, v. 23, n. 1, p. 14901, doi. 10.1117/1.JMM.23.1.014901
    By:
    • Richter, Michael;
    • Beckenbach, Thomas;
    • Rauch, Constantin;
    • Schreiner, Stephan;
    • Zuber, Marcus;
    • Hamann, Elias;
    • Last, Arndt;
    • Börner, Martin;
    • Korvink, Jan;
    • Meyer, Pascal
    Publication type:
    Article
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