Works matching AU 闫施锦

Results: 2
    1

    压力传感器湿法腐蚀敏感膜的工艺研究.

    Published in:
    Piezoelectrics & Acoustooptics, 2025, v. 47, n. 1, p. 63, doi. 10.11977/j.issn.1004-2474.2025.01.010
    By:
    • 闫施锦;
    • 王丙寅;
    • 王志强;
    • 雷 程;
    • 冀鹏飞;
    • 邱海兵;
    • 谭秋林;
    • 梁 庭
    Publication type:
    Article
    2

    用于E型薄膜制备的双掩膜工艺研究.

    Published in:
    Piezoelectrics & Acoustooptics, 2024, v. 46, n. 4, p. 505, doi. 10.11977/j.issn.1004-2474.2024.04.015
    By:
    • 郝一鸣;
    • 雷 程;
    • 王涛龙;
    • 余建刚;
    • 冀鹏飞;
    • 闫施锦;
    • 梁 庭
    Publication type:
    Article