Works by 郭耀祖

ICP 刻蚀 Mo 侧壁角度及刻蚀速率的研究.

Published in:

Piezoelectrics & Acoustooptics, 2025, v. 47, n. 1, p. 59, doi. 10.11977/j.issn.1004-2474.2025.01.009

By:

• 田本朗;
• 梁柳洪;
• 何成勇;
• 罗 淦;
• 郭耀祖;
• 米 佳

Publication type:

Article