集成式石英微机械陀螺质量块制作工艺研究.Published in:Piezoelectrics & Acoustooptics, 2023, v. 45, n. 5, p. 731, doi. 10.11977/j.issn.1004-2474.2023.05.015By:白顺风;李贵龙;张 挺;谢佳维;董宏奎;王 枥;胡 爽;曾庆海;李睿杰;简小娟Publication type:Article