TC-SAW SiO<sub>2</sub> 温补层性能研究.
- Published in:
- Piezoelectrics & Acoustooptics, 2025, v. 47, n. 1, p. 88, doi. 10.11977/j.issn.1004-2474.2025.01.014
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- Publication type:
- Article
Works by 田本朗
Results: 8
1
2
ICP 刻蚀 Mo 侧壁角度及刻蚀速率的研究.
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- Piezoelectrics & Acoustooptics, 2025, v. 47, n. 1, p. 59, doi. 10.11977/j.issn.1004-2474.2025.01.009
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- Publication type:
- Article
3
基于裸芯片覆膜的薄膜体声波滤波器.
- Published in:
- Piezoelectrics & Acoustooptics, 2021, v. 43, n. 3, p. 299, doi. 10.11977/j.issn.1004-2021.03.001
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- Publication type:
- Article
4
单晶薄膜体声波谐振器频率温度特性研究.
- Published in:
- Piezoelectrics & Acoustooptics, 2020, v. 42, n. 4, p. 448, doi. 10.11977/j.issn.1004.2474.2020.04.004
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- Publication type:
- Article
5
布喇格反射型宽带单晶薄膜体声波滤波器.
- Published in:
- Piezoelectrics & Acoustooptics, 2020, v. 42, n. 3, p. 303, doi. 10.11977/j.issn.1004-2474.2020.03.005
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- Publication type:
- Article
6
LiNbO<sub>3</sub>单晶薄膜体声波谐振器的研制.
- Published in:
- Piezoelectrics & Acoustooptics, 2019, v. 41, n. 3, p. 330, doi. 10.11977/j.issn.1004-2474.2019.03.003
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- Publication type:
- Article
7
二氟化氙释放牺牲层多晶硅刻蚀速率研究.
- Published in:
- Piezoelectrics & Acoustooptics, 2016, v. 38, n. 6, p. 926
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- Publication type:
- Article
8
薄膜体声波谐振器有限元仿真与设计.
- Published in:
- Piezoelectrics & Acoustooptics, 2016, v. 38, n. 4, p. 531
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- Publication type:
- Article