基于腔体 SOI 的 CMUT 工艺方法及性能研究.
- Published in:
- Piezoelectrics & Acoustooptics, 2025, v. 47, n. 2, p. 343, doi. 10.11977/j.issn.1004-2474.2025.02.023
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- Publication type:
- Article
Works by 王任鑫
Results: 5
1
2
基于薄板理论的密排结构 CMUT 发射声场研究.
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- Piezoelectrics & Acoustooptics, 2023, v. 45, n. 1, p. 98, doi. 10.11977/j.issn.1004-2427.2023.01.019
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- Article
3
一种电容式声压水听器的热粘性声学仿真研究.
- Published in:
- Piezoelectrics & Acoustooptics, 2019, v. 41, n. 6, p. 894, doi. 10.11977/j.issn.1004-2474.2019.06.019
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- Publication type:
- Article
4
基于各向同性干法刻蚀的大面积悬空Al膜制备.
- Published in:
- Piezoelectrics & Acoustooptics, 2018, v. 40, n. 6, p. 942, doi. 10.11977/j.issn.1004-2474.2018.06.031
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- Publication type:
- Article
5
一种基于正面对准的 CMUT 制备工艺.
- Published in:
- Micronanoelectronic Technology, 2024, v. 61, n. 9, p. 1, doi. 10.13250/j.cnki.wndz.24090507
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- Publication type:
- Article