用于磁控溅射膜的一种剥离技术.Published in:Piezoelectrics & Acoustooptics, 2018, v. 40, n. 3, p. 331, doi. 10.11977/j.issn.1004-2474.2018.03.006By:刘娅;杨正兵;蒋欣;李磊;何西良;徐阳Publication type:Article