基于 4H-SiC 的差分电容真空计设计及仿真.Published in:Journal of Test & Measurement Technology, 2025, v. 39, n. 2, p. 211, doi. 10.62756/csjs.1671-7449.2025016By:李鑫浦;张姝;雷程;张臻昊;李志强;余建刚;梁庭Publication type:Article