基于GRA 微细铣削单晶硅工艺参数优化及试验研究.Published in:Machine Tool & Hydraulics, 2024, v. 52, n. 14, p. 59, doi. 10.3969/j.issn.1001-3881.2024.14.010By:朱译文;曹自洋;徐文杰;杨凯Publication type:Article