空气隙型横向激励薄膜体声波滤波器工艺研究.Published in:Piezoelectrics & Acoustooptics, 2025, v. 47, n. 2, p. 220, doi. 10.11977/j.issn.1004-2474.2025.02.004By:舒 平;李桦林;梁柳洪;谭发曾;冷峻林;陈 兴Publication type:Article