Works by 何西良

Results: 5
    1

    压电单晶薄膜衬底光刻工艺研究.

    Published in:
    Piezoelectrics & Acoustooptics, 2021, v. 43, n. 4, p. 583, doi. 10.11977/j.issn.1004-2474.2021.04.030
    By:
    • 唐代华;
    • 潘 祺;
    • 米 佳;
    • 冷俊林;
    • 唐 黄;
    • 何西良;
    • 黎 妮
    Publication type:
    Article
    2

    S 波段低插损 FBAR 陷波器的研制.

    Published in:
    Piezoelectrics & Acoustooptics, 2021, v. 43, n. 2, p. 157, doi. 10.11977/j.issn.1004-2474.2021.02.001
    By:
    • 蒋平英;
    • 蒋世义;
    • 何西良;
    • 陈金琳;
    • 彭霄;
    • 徐阳;
    • 刘娅
    Publication type:
    Article
    3

    交指型MEMS滤波器的优化设计.

    Published in:
    Piezoelectrics & Acoustooptics, 2019, v. 41, n. 4, p. 473, doi. 10.11977/j.issn.1004-2474.2019.04.003
    By:
    • 唐小龙;
    • 金中;
    • 何西良;
    • 刘娅;
    • 梁柳洪;
    • 刘洋宏
    Publication type:
    Article
    4

    用于磁控溅射膜的一种剥离技术.

    Published in:
    Piezoelectrics & Acoustooptics, 2018, v. 40, n. 3, p. 331, doi. 10.11977/j.issn.1004-2474.2018.03.006
    By:
    • 刘娅;
    • 杨正兵;
    • 蒋欣;
    • 李磊;
    • 何西良;
    • 徐阳
    Publication type:
    Article
    5

    薄膜体声波谐振器调频工艺研究.

    Published in:
    Piezoelectrics & Acoustooptics, 2018, v. 40, n. 2, p. 162, doi. 10.11977/j.issn.1004-2474.2018.02.003
    By:
    • 彭兴文;
    • 徐 阳;
    • 杜 波;
    • 张永川;
    • 司美菊;
    • 刘 娅;
    • 何西良;
    • 卢丹丹
    Publication type:
    Article