Works matching IS 0038111X AND DT 1998 AND VI 41 AND IP 7
Results: 45
Two sides of the debate on 300-mm tool costs.
- Published in:
- Solid State Technology, 1998, v. 41, n. 7, p. 344
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- Publication type:
- Article
New literature.
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- Solid State Technology, 1998, v. 41, n. 7, p. 335
- Publication type:
- Article
Product spotlight.
- Published in:
- Solid State Technology, 1998, v. 41, n. 7, p. 279
- Publication type:
- Article
Critical drying technology for deep submicron processes.
- Published in:
- Solid State Technology, 1998, v. 41, n. 7, p. 271
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- Publication type:
- Article
Windows NT's foundation for equipment automation.
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- Solid State Technology, 1998, v. 41, n. 7, p. 261
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- Publication type:
- Article
Deposits on semiconductor corona emitters in cleanroom and...
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- Solid State Technology, 1998, v. 41, n. 7, p. 249
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- Publication type:
- Article
Chip scale and flip chip: Attractive solutions.
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- Solid State Technology, 1998, v. 41, n. 7, p. 239
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- Publication type:
- Article
`One-day install' of fab equipment.
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- Solid State Technology, 1998, v. 41, n. 7, p. 229
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- Publication type:
- Article
Using a Web intranet for fab data distribution.
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- Solid State Technology, 1998, v. 41, n. 7, p. 215
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- Publication type:
- Article
Model-based adaptive process control: A CD-control example.
- Published in:
- Solid State Technology, 1998, v. 41, n. 7, p. 205
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- Publication type:
- Article
Integration risks in 300-mm wafer fab automation.
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- Solid State Technology, 1998, v. 41, n. 7, p. 193
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- Publication type:
- Article
NTRS critical-level lithography: Reading between the lines.
- Published in:
- Solid State Technology, 1998, v. 41, n. 7, p. 181
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- Publication type:
- Article
Wide margin CMP for STI.
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- Solid State Technology, 1998, v. 41, n. 7, p. 173
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- Publication type:
- Article
Model-based analysis for precise and accurate epitaxial...
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- Solid State Technology, 1998, v. 41, n. 7, p. 161
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- Publication type:
- Article
Surface cleaning using energetic microcluster beams.
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- Solid State Technology, 1998, v. 41, n. 7, p. 149
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- Publication type:
- Article
Barrier and seed layers for damascene copper metallization.
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- Solid State Technology, 1998, v. 41, n. 7, p. 141
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- Publication type:
- Article
Atmospheric downstream plasma--a new tool for semiconductor...
- Published in:
- Solid State Technology, 1998, v. 41, n. 7, p. 133
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- Publication type:
- Article
Europe.
- Published in:
- Solid State Technology, 1998, v. 41, n. 7, p. 40
- Publication type:
- Article
Wet-etch process improvements through SPC.
- Published in:
- Solid State Technology, 1998, v. 41, n. 7, p. 119
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- Publication type:
- Article
IBM advanced lithography facility: The first five years.
- Published in:
- Solid State Technology, 1998, v. 41, n. 7, p. 101
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- Publication type:
- Article
Rapid thermal processing market.
- Published in:
- Solid State Technology, 1998, v. 41, n. 7, p. 92
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- Publication type:
- Article
Asiafocus.
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- Solid State Technology, 1998, v. 41, n. 7, p. 86
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- Publication type:
- Article
Eurofocus.
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- Solid State Technology, 1998, v. 41, n. 7, p. 80
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- Publication type:
- Article
Cu, low-k dielectrics top MRS meeting agenda.
- Published in:
- Solid State Technology, 1998, v. 41, n. 7, p. 66
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- Publication type:
- Article
Israel's Nova expands metrology line.
- Published in:
- Solid State Technology, 1998, v. 41, n. 7, p. 62
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- Article
Patent briefs.
- Published in:
- Solid State Technology, 1998, v. 41, n. 7, p. 62
- Publication type:
- Article
CMOS `down in the mouth.'
- Published in:
- Solid State Technology, 1998, v. 41, n. 7, p. 60
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- Publication type:
- Article
Chemists rewrite boron chemistry reference.
- Published in:
- Solid State Technology, 1998, v. 41, n. 7, p. 60
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- Publication type:
- Article
New venture to commercialize EUV litho technology.
- Published in:
- Solid State Technology, 1998, v. 41, n. 7, p. 58
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- Publication type:
- Article
Outlook improving for 193-nm material.
- Published in:
- Solid State Technology, 1998, v. 41, n. 7, p. 54
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- Publication type:
- Article
`Manufacturable' 100-nm features from 248-nm lithography.
- Published in:
- Solid State Technology, 1998, v. 41, n. 7, p. 54
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- Publication type:
- Article
Semiconductor300 attacks 300-mm challenges.
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- Solid State Technology, 1998, v. 41, n. 7, p. 52
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- Article
IBM's copper technology.
- Published in:
- Solid State Technology, 1998, v. 41, n. 7, p. 52
- Publication type:
- Article
Copper ECD in beta test.
- Published in:
- Solid State Technology, 1998, v. 41, n. 7, p. 52
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- Article
Tech briefs.
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- Solid State Technology, 1998, v. 41, n. 7, p. 48
- Publication type:
- Article
Novellus, others unveil integrated copper system.
- Published in:
- Solid State Technology, 1998, v. 41, n. 7, p. 48
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- Publication type:
- Article
Rest of world.
- Published in:
- Solid State Technology, 1998, v. 41, n. 7, p. 40
- Publication type:
- Article
Asia/Pacific.
- Published in:
- Solid State Technology, 1998, v. 41, n. 7, p. 40
- Publication type:
- Article
Japan.
- Published in:
- Solid State Technology, 1998, v. 41, n. 7, p. 38
- Publication type:
- Article
ISO briefs.
- Published in:
- Solid State Technology, 1998, v. 41, n. 7, p. 34
- Publication type:
- Article
Financial briefs.
- Published in:
- Solid State Technology, 1998, v. 41, n. 7, p. 32
- Publication type:
- Article
World Wide Web briefs.
- Published in:
- Solid State Technology, 1998, v. 41, n. 7, p. 28
- Publication type:
- Article
USA.
- Published in:
- Solid State Technology, 1998, v. 41, n. 7, p. 26
- Publication type:
- Article
Worldwide highlights.
- Published in:
- Solid State Technology, 1998, v. 41, n. 7, p. 26
- Publication type:
- Article
Go to the big show! See the high flyers!
- Published in:
- 1998
- By:
- Publication type:
- Editorial