FANETA includes Nextral plasma etcher.
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- Solid State Technology, 1998, v. 41, n. 1, p. 36
- Publication type:
- Article
Works matching DE "PLASMA etching equipment"
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Plasma Sprayed Coatings of High-Purity Ceramics for Semiconductor and Flat-Panel-Display Production Equipment.
- Published in:
- Journal of Thermal Spray Technology, 2008, v. 17, n. 5/6, p. 878, doi. 10.1007/s11666-008-9285-y
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- Article