Works matching IS 0038111X AND DT 1999 AND VI 42 AND IP 5
Results: 18
Equipment life after shrinks.
- Published in:
- Solid State Technology, 1999, v. 42, n. 5, p. 88
- By:
- Publication type:
- Article
Exhaust gas monitoring: New window into semiconductor processing.
- Published in:
- Solid State Technology, 1999, v. 42, n. 5, p. 61
- By:
- Publication type:
- Article
In situ x-ray reflectivity for thin-film deposition monitoring and control.
- Published in:
- Solid State Technology, 1999, v. 42, n. 5, p. 53
- By:
- Publication type:
- Article
Low-k dielectric costs for dual-damascene integration.
- Published in:
- Solid State Technology, 1999, v. 42, n. 5, p. 43
- By:
- Publication type:
- Article
Single-layer resist design for 193nm lithography.
- Published in:
- Solid State Technology, 1999, v. 42, n. 5, p. 29
- By:
- Publication type:
- Article
At CMP-MIC, new models impose science on CMP.
- Published in:
- Solid State Technology, 1999, v. 42, n. 5, p. 24
- By:
- Publication type:
- Article
Report from DUMIC: Low-k still in development.
- Published in:
- Solid State Technology, 1999, v. 42, n. 5, p. 22
- By:
- Publication type:
- Article
Patent Briefs.
- Published in:
- Solid State Technology, 1999, v. 42, n. 5, p. 22
- Publication type:
- Article
Novellus drops parylene, bets on SiOC low-k.
- Published in:
- Solid State Technology, 1999, v. 42, n. 5, p. 22
- By:
- Publication type:
- Article
Quarterly Briefs.
- Published in:
- Solid State Technology, 1999, v. 42, n. 5, p. 18
- Publication type:
- Article
Financial Briefs.
- Published in:
- Solid State Technology, 1999, v. 42, n. 5, p. 16
- Publication type:
- Article
Rest of World.
- Published in:
- Solid State Technology, 1999, v. 42, n. 5, p. 18
- Publication type:
- Article
Europe.
- Published in:
- Solid State Technology, 1999, v. 42, n. 5, p. 18
- Publication type:
- Article
Asia/Pacific.
- Published in:
- Solid State Technology, 1999, v. 42, n. 5, p. 18
- Publication type:
- Article
Japan.
- Published in:
- Solid State Technology, 1999, v. 42, n. 5, p. 16
- Publication type:
- Article
USA.
- Published in:
- Solid State Technology, 1999, v. 42, n. 5, p. 14
- Publication type:
- Article
Worldwide highlights.
- Published in:
- Solid State Technology, 1999, v. 42, n. 5, p. 14
- Publication type:
- Article
Roadmapping over shifting terrain.
- Published in:
- 1999
- By:
- Publication type:
- Editorial