Works matching IS 0038111X AND DT 1999 AND VI 42 AND IP 4

Results: 27

Full speed ahead on 157-nm lithography.

Published in:

Solid State Technology, 1999, v. 42, n. 4, p. 26

By:

Burggraaf, Pieter "Pete";
Dunn, Peter N.

Publication type:

Article

0.1-Mu m silicon from 0.18-Mu m, double exposure on horizon.

Published in:

Solid State Technology, 1999, v. 42, n. 4, p. 28

By:

Dunn, Peter N.;
Burggraaf, Peter "Pete"

Publication type:

Article

Wafer-level packaging gains momentum.

Published in:

Solid State Technology, 1999, v. 42, n. 4, p. 45

By:

Elenius, Peter

Publication type:

Article

Microdisplays: The next big market?

Published in:

Solid State Technology, 1999, v. 42, n. 4, p. 38

By:

Chinnock, Chris

Publication type:

Article

Steag acquires AG Assoc.

Published in:

Solid State Technology, 1999, v. 42, n. 4, p. 30

By:

Lunday, Christine

Publication type:

Article

Achieving uniform, systematic APC in multiple fabs.

Published in:

Solid State Technology, 1999, v. 42, n. 4, p. 100

By:

Vickers, Kenneth G.

Publication type:

Article

Fast noncontact diffusion-process monitoring.

Published in:

Solid State Technology, 1999, v. 42, n. 4, p. 67

By:

DeBusk, Damon K.;
Hoff, Andrew M.

Publication type:

Article

Thermal-based mass flow control for SDS gas delivery systems.

Published in:

Solid State Technology, 1999, v. 42, n. 4, p. 59

By:

Urdaneta, Nelson;
Krell, John;
Brown, Bob

Publication type:

Article

Barriers for copper interconnections.

Published in:

Solid State Technology, 1999, v. 42, n. 4, p. 53

By:

Ryu, Changsup;
Lee, Haebum;
Kwon, Kee-Won;
Loke, Alvin L.S.;
Wong, S. Simon

Publication type:

Article

Japan's government to fund ASET, chamber cleaning, Roadmap.

Published in:: Solid State Technology, 1999, v. 42, n. 4, p. 34
Publication type:: Article

ISS-Japan roundup: roadmaps, minilines, and forecasts.

Published in:: Solid State Technology, 1999, v. 42, n. 4, p. 32
Publication type:: Article

Shin-Etsu to buy Hitachi's wafer operations.

Published in:: Solid State Technology, 1999, v. 42, n. 4, p. 34
Publication type:: Article

Siemens' 300-mm plans.

Published in:

Solid State Technology, 1999, v. 42, n. 4, p. 30

By:

Dunn, Peter N.

Publication type:

Article

TSMC to spend less in '99.

Published in:

Solid State Technology, 1999, v. 42, n. 4, p. 32

By:

Dunn, Peter N.

Publication type:

Article

Asia Briefs.

Published in:: Solid State Technology, 1999, v. 42, n. 4, p. 32
Publication type:: Article

New technology picks up at CD SEMs' limit.

Published in:

Solid State Technology, 1999, v. 42, n. 4, p. 22

By:

Burggraaf, Pieter "Pete"

Publication type:

Article

Rest of world.

Published in:: Solid State Technology, 1999, v. 42, n. 4, p. 18
Publication type:: Article

Europe.

Published in:: Solid State Technology, 1999, v. 42, n. 4, p. 18
Publication type:: Article

1999's `big bang' of NGL activity.

Published in:

Solid State Technology, 1999, v. 42, n. 4, p. 22

By:

Dunn, Peter N.

Publication type:

Article

Patent Briefs.

Published in:: Solid State Technology, 1999, v. 42, n. 4, p. 22
Publication type:: Article

Asia/Pacific.

Published in:: Solid State Technology, 1999, v. 42, n. 4, p. 18
Publication type:: Article

Quarterly Briefs.

Published in:: Solid State Technology, 1999, v. 42, n. 4, p. 18
Publication type:: Article

Japan.

Published in:: Solid State Technology, 1999, v. 42, n. 4, p. 18
Publication type:: Article

USA.

Published in:: Solid State Technology, 1999, v. 42, n. 4, p. 14
Publication type:: Article

Financial Briefs.

Published in:: Solid State Technology, 1999, v. 42, n. 4, p. 16
Publication type:: Article

Worldwide highlights.

Published in:: Solid State Technology, 1999, v. 42, n. 4, p. 14
Publication type:: Article

Back on the road to riches?

Published in:

Solid State Technology, 1999, v. 42, n. 4, p. 10

By:

Haavind, Robert

Publication type:

Article