Atomic layer deposition of ZnO thin films and dot structures.

Godlewski, Marek; Kopalko, Krzysztof; Szczerbakow, Andrzej; Łusakowska, Elżbieta; Godlewski, Michał M.; Goldys, Ewa M.; Butcher, Kenneth Scott A.; Phillips, Matthew R.

Proceedings of the Estonian Academy of Sciences, Physics, Mathematics, 2003, Vol 52, Issue 3, p277

1406-0086

Academic Journal