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- Title
Impacts of Material Performance Indices and Length Scale Parameter on Thermoelastic Damping in Micro/Nanoplates Applying Modified Couple Stress Theory.
- Authors
RESMI, R.; BABU, V. SURESH; BAIJU, M. R.
- Abstract
Energy dissipation in micro- and nanoscale resonators can be optimized by improving the thermoelastic-damping-limited quality factor. Maximizing energy dissipation is interrelated with the critical lengthof the resonator plates; by optimizing the dimensions, the peaking of energy dissipation can be diminished. However, classical continuum theories cannot explain the size effects related to mechanical behavior at micron or submicron sizes. In this study, isotropic rectangular micro-plates are used to analyze the size-dependent thermoelastic damping and its impact on the quality factor and critical dimensions such as critical length of micro/nano plates. Micro- and nanoplates using five different structural materials are analyzed to optimize quality factor, which depends on two material performance indices: thermoelastic damping index and thermal diffusion length. In our study, an expression for the thermoelastic damping limited quality factor is derived in terms of the material performance indices and simulated numerically using MATLAB R2015a. Accordingly, the maximum thermoelastic damping limited quality factor is attained for polySi with the lowest thermoelastic damping index and maximum critical length is obtained for SiC with the lowest thermal diffusion length. The impact of material length-scale parameters l, material performance indices, vibration modes, and boundary conditions on quality factor limited by thermoelastic damping and critical length are also investigated. Quality factor is maximized by selecting polySi as the structural material with higher internal length-scale parameters l. These results can help designers to engineer high-performance, low-loss resonators at micro/nanoscales.
- Publication
Mechanika, 2022, Vol 28, Issue 3, p171
- ISSN
1392-1207
- Publication type
Academic Journal
- DOI
10.5755/j02.mech.25841