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- Title
Scanning X-ray nanodiffraction: from the experimental approach towards spatially resolved scattering simulations.
- Authors
Dubslaff, Martin; Hanke, Michael; Patommel, Jens; Hoppe, Robert; Schroer, Christian G; Schöder, Sebastian; Burghammer, Manfred
- Abstract
: An enhancement on the method of X-ray diffraction simulations for applications using nanofocused hard X-ray beams is presented. We combine finite element method, kinematical scattering calculations, and a spot profile of the X-ray beam to simulate the diffraction of definite parts of semiconductor nanostructures. The spot profile could be acquired experimentally by X-ray ptychography. Simulation results are discussed and compared with corresponding X-ray nanodiffraction experiments on single SiGe dots and dot molecules.
- Publication
Nanoscale research letters, 2012, Vol 7, Issue 1, p553
- ISSN
1556-276X
- Publication type
Journal Article
- DOI
10.1186/1556-276X-7-553