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- Title
An interferometric scanning microwave microscope and calibration method for sub-fF microwave measurements.
- Authors
Dargent, T; Haddadi, K; Lasri, T; Clément, N; Ducatteau, D; Legrand, B; Tanbakuchi, H; Theron, D
- Abstract
We report on an adjustable interferometric set-up for Scanning Microwave Microscopy. This interferometer is designed in order to combine simplicity, a relatively flexible choice of the frequency of interference used for measurements as well as the choice of impedances range where the interference occurs. A vectorial calibration method based on a modified 1-port error model is also proposed. Calibrated measurements of capacitors have been obtained around the test frequency of 3.5 GHz down to about 0.1 fF. Comparison with standard vector network analyzer measurements is shown to assess the performance of the proposed system.
- Publication
The Review of scientific instruments, 2013, Vol 84, Issue 12, p123705
- ISSN
1089-7623
- Publication type
Journal Article
- DOI
10.1063/1.4848995