Works matching DE "COPPER"


Results: 5000
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    For copper processes.

    Published in:
    Solid State Technology, 2001, v. 44, n. 11, p. 83
    By:
    • Banerjee, Gautam;
    • So, Joseph;
    • Mikkola, Bob
    Publication type:
    Article
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    Low-k dialectric metrology.

    Published in:
    Solid State Technology, 2000, v. 43, n. 8, p. 55
    By:
    • Srivatsa, Arun R.;
    • Ygartua, Carlos L.;
    • Weinzierl, Steve;
    • Johnson, Walter;
    • Kaack, Torsten
    Publication type:
    Article
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    Barriers for copper interconnections.

    Published in:
    Solid State Technology, 1999, v. 42, n. 4, p. 53
    By:
    • Ryu, Changsup;
    • Lee, Haebum;
    • Kwon, Kee-Won;
    • Loke, Alvin L.S.;
    • Wong, S. Simon
    Publication type:
    Article
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