Works matching DE "ELECTRON beam lithography"

Results: 462

Cover Picture.

Published in:: Chinese Journal of Chemistry, 2025, v. 43, n. 13, p. 1469, doi. 10.1002/cjoc.70137
Publication type:: Article

Nonchemically‐Amplified Molecular Resists Based on Calixarene Derivatives Enabling 14 nm Half‐Pitch Nanolithography.

Published in:

Chinese Journal of Chemistry, 2025, v. 43, n. 13, p. 1513, doi. 10.1002/cjoc.202500041

By:

Peng, Rongrong;
Chen, Jinping;
Yu, Tianjun;
Zeng, Yi;
Wang, Shuangqing;
Guo, Xudong;
Hu, Rui;
Tian, Peng;
Vockenhuber, Michaela;
Kazazis, Dimitrios;
Zhao, Jun;
Wu, Yanqin;
Ekinci, Yasin;
Yang, Guoqiang;
Li, Yi

Publication type:

Article

Two-dimensional ferroelectric α-In2Se3 channel transistors and their synaptic properties.

Published in:

Acta Scientiarum Naturalium Universitatis Sunyatseni / Zhongshan Daxue Xuebao, 2025, v. 64, n. 3, p. 103, doi. 10.13471/j.cnki.acta.snus.ZR20250041

By:

HU Chen;
PENG Songang

Publication type:

Article

Space charge effects in e-beam projection lithography.

Published in:

Solid State Technology, 2000, v. 43, n. 7, p. 241

By:

Mkrtchyan, Masis;
Liddle, J. Alexander;
Harriott, Lloyd R.;
Munro, Eric

Publication type:

Article

Favored SCALPEL's continued progress.

Published in:

Solid State Technology, 1999, v. 42, n. 7, p. 73

By:

Harriott, Lloyd;
Waskiewicz, Warren;
Novembre, Anthony;
Liddle, J. Alexander

Publication type:

Article

Cover Feature: Covalent Patterning of 2D MoS2 (Chem. Eur. J. 52/2021).

Published in:

Chemistry - A European Journal, 2021, v. 27, n. 52, p. 13094, doi. 10.1002/chem.202102909

By:

Chen, Xin;
Kohring, Malte;
Assebban, M'hamed;
Tywoniuk, Bartłomiej;
Bartlam, Cian;
Moses Badlyan, Narine;
Maultzsch, Janina;
Duesberg, Georg S.;
Weber, Heiko B.;
Knirsch, Kathrin C.;
Hirsch, Andreas

Publication type:

Article

Covalent Patterning of 2D MoS2.

Published in:

Chemistry - A European Journal, 2021, v. 27, n. 52, p. 13117, doi. 10.1002/chem.202102021

By:

Chen, Xin;
Kohring, Malte;
Assebban, M'hamed;
Tywoniuk, Bartłomiej;
Bartlam, Cian;
Moses Badlyan, Narine;
Maultzsch, Janina;
Duesberg, Georg S.;
Weber, Heiko B.;
Knirsch, Kathrin C.;
Hirsch, Andreas

Publication type:

Article

Synthesis and properties of antimony-doped ZnO nanorods.

Published in:

Inorganic Materials, 2013, v. 49, n. 2, p. 127, doi. 10.1134/S0020168513020027

By:

Baranov, A.;
Kovalenko, A.;
Kononenko, O.;
Emelin, E.;
Matveev, D.

Publication type:

Article

Design Strategy for Nanostructured Arrays of Metallodielectric Cuboids to Systematically Tune the Optical Response and Eliminate Spurious Bulk Effects in Plasmonic Biosensors.

Published in:

Bioengineering (Basel), 2022, v. 9, n. 2, p. 63, doi. 10.3390/bioengineering9020063

By:

Grab, Anna Luise;
Bacher, Andreas;
Nesterov-Mueller, Alexander;
Dahint, Reiner

Publication type:

Article

Carbon and graphene quantum dots in fuel cell application: An overview.

Published in:

International Journal of Energy Research, 2021, v. 45, n. 2, p. 1396, doi. 10.1002/er.5889

By:

Shaari, Norazuwana;
Kamarudin, Siti Kartom;
Bahru, Raihana

Publication type:

Article

Electrical Detection of Magnetic Skyrmions in a Magnetic Tunnel Junction.

Published in:

Advanced Electronic Materials, 2023, v. 9, n. 1, p. 1, doi. 10.1002/aelm.202200570

By:

Guang, Yao;
Zhang, Like;
Zhang, Junwei;
Wang, Yadong;
Zhao, Yuelei;
Tomasello, Riccardo;
Zhang, Senfu;
He, Bin;
Li, Jiahui;
Liu, Yizhou;
Feng, Jiafeng;
Wei, Hongxiang;
Carpentieri, Mario;
Hou, Zhipeng;
Liu, Junming;
Peng, Yong;
Zeng, Zhongming;
Finocchio, Giovanni;
Zhang, Xixiang;
Coey, John Michael David

Publication type:

Article

Nanosphere Lithography for Sub‐10‐nm Nanogap Electrodes.

Published in:

Advanced Electronic Materials, 2017, v. 3, n. 1, p. 1, doi. 10.1002/aelm.201600348

By:

Ji, Deyang;
Li, Tao;
Fuchs, Harald

Publication type:

Article

Effects of Electron Beam Lithography Process Parameters on the Structure of Nanoscale Devices Across Three Substrate Materials.

Published in:

Photonics, 2025, v. 12, n. 3, p. 226, doi. 10.3390/photonics12030226

By:

Liu, Zhongyang;
Chen, Yue;
Li, Xuanyu;
Wang, Luwei;
Qu, Junle

Publication type:

Article

Fabrication of Circular Defects in 2-Dimensional Photonic Crystal Lasers with Convex Edge Structure.

Published in:

Photonics, 2024, v. 11, n. 9, p. 853, doi. 10.3390/photonics11090853

By:

Zuo, Rubing;
Adachi, Yuki;
Kudo, Yuto;
Ye, Hanqiao;
Yagi, Tetsuya;
Morifuji, Masato;
Kajii, Hirotake;
Maruta, Akihiro;
Kondow, Masahiko

Publication type:

Article

Cryogenic Thermo-Optical Coefficient of SU-8 Measured Using a Racetrack Resonator at 850 nm.

Published in:

Photonics, 2024, v. 11, n. 9, p. 800, doi. 10.3390/photonics11090800

By:

Medina-Rangel, Salvador A.;
Maraviglia, Nicola;
O'Hara, John;
Vorobev, Artem S.;
Iadanza, Simone;
Pelucchi, Emanuele;
O'Faolain, Liam

Publication type:

Article

Impact of Grating Duty-Cycle Randomness on DFB Laser Performance.

Published in:

Photonics, 2024, v. 11, n. 6, p. 574, doi. 10.3390/photonics11060574

By:

Yang, Manpo;
Kong, Xiangpeng;
Li, Xun

Publication type:

Article

An Ultrabroadband and Cost-Effective Edge Coupler for Efficient Thin Film Lithium Niobate Photonics.

Published in:

Photonics, 2023, v. 10, n. 7, p. 760, doi. 10.3390/photonics10070760

By:

Chen, Houhong;
Ma, Fei;
Chen, Ke;
Dong, Jianwen

Publication type:

Article

Precursor‐Derived Sensing Interdigitated Electrode Microstructures Based on Platinum and Nano Porous Carbon.

Published in:

ChemistryOpen, 2024, v. 13, n. 11, p. 1, doi. 10.1002/open.202400179

By:

Mielewczyk, Lukas;
Galle, Lydia;
Niese, Nick;
Grothe, Julia;
Kaskel, Stefan

Publication type:

Article

Transport and Field Emission Properties of MoS2 Bilayers.

Published in:

Nanomaterials (2079-4991), 2018, v. 8, n. 3, p. 151, doi. 10.3390/nano8030151

By:

Urban, Francesca;
Passacantando, Maurizio;
Giubileo, Filippo;
Iemmo, Laura;
Di Bartolomeo, Antonio

Publication type:

Article

Contact Resistance and Channel Conductance of Graphene Field-Effect Transistors under Low-Energy Electron Irradiation.

Published in:

Nanomaterials (2079-4991), 2016, v. 6, n. 11, p. 206, doi. 10.3390/nano6110206

By:

Giubileo, Filippo;
Di Bartolomeo, Antonio;
Martucciello, Nadia;
Romeo, Francesco;
Iemmo, Laura;
Romano, Paola;
Passacantando, Maurizio

Publication type:

Article

Self-aligned molding technology (SAMT) for fabrication of 3D structures with a foldable imprint mold.

Published in:

Applied Nanoscience, 2019, v. 9, n. 6, p. 1255, doi. 10.1007/s13204-019-01050-0

By:

Smolarczyk, Marek;
Jablonka, Lukas;
Reuter, Sabrina;
Hillmer, Hartmut

Publication type:

Article

Smuggling light through opaque materials.

Published in:

Physics & Chemistry of Glasses: European Journal of Glass Science & Technology Part B, 2021, v. 62, n. 5, p. 165

By:

Kingery, Ken

Publication type:

Article

Fabrication of platinum nanoparticles and nanowires by electron beam lithography (EBL) and nanoimprint lithography (NIL): comparison of ethylene hydrogenation kinetics.

Published in:

Catalysis Letters, 2005, v. 100, n. 3/4, p. 115, doi. 10.1007/s10562-004-3436-7

By:

Contreras, A. M.;
Grunes, J.;
Yan, X.-M.;
Liddle, A.;
Somorjai, G.A.

Publication type:

Article

Microfabrication of FeMnPt films involving magnetic phase change due to structural transformation caused by ion irradiation.

Published in:

Physica Status Solidi - Rapid Research Letters, 2016, v. 10, n. 6, p. 498, doi. 10.1002/pssr.201600031

By:

Hasegawa, Takashi;
Kasahara, Ryosuke;
Sasaki, Kaori;
Ishio, Shunji

Publication type:

Article

Resistless Fabrication of Nanoimprint Lithography (NIL) Stamps Using Nano-Stencil Lithography.

Published in:

Micromachines, 2013, v. 4, n. 4, p. 370, doi. 10.3390/mi4040370

By:

Villanueva, Luis Guillermo;
Vazquez-Mena, Oscar;
Martin-Olmos, Cristina;
Savu, Veronica;
Sidler, Katrin;
Brugger, Juergen

Publication type:

Article

Angle sensitivity testing of equal-period plane diffraction grating fabricated through electron beam lithography line-by-line method.

Published in:

Modern Physics Letters B, 2021, v. 35, n. 8, p. N.PAG, doi. 10.1142/S021798492150144X

By:

Dong, Yunhui;
He, Wei;
Zhang, Wen;
Dong, Mingli

Publication type:

Article

Properties of Extremely Narrow Gaps Between Electrodes of a Molecular Transistor.

Published in:

Journal of Superconductivity & Novel Magnetism, 2015, v. 28, n. 3, p. 787, doi. 10.1007/s10948-014-2875-7

By:

Dagesyan, S.;
Soldatov, E.;
Snigirev, O.;
Stepanov, A.

Publication type:

Article

Increasing cell adhesion on plasma deposited fluorocarbon coatings by changing the surface topography.

Published in:

Journal of Biomedical Materials Research, Part B: Applied Biomaterials, 2009, v. 88B, n. 1, p. 139, doi. 10.1002/jbm.b.31160

By:

Gristina, Roberto;
D'Aloia, Erica;
Senesi, Giorgio S.;
Milella, Antonella;
Nardulli, Marina;
Sardella, Eloisa;
Favia, Pietro;
d'Agostino, Riccardo

Publication type:

Article

Advancements in Lithography Techniques and Emerging Molecular Strategies for Nanostructure Fabrication.

Published in:

International Journal of Molecular Sciences, 2025, v. 26, n. 7, p. 3027, doi. 10.3390/ijms26073027

By:

Basu, Prithvi;
Verma, Jyoti;
Abhinav, Vishnuram;
Ratnesh, Ratneshwar Kumar;
Singla, Yogesh Kumar;
Kumar, Vibhor

Publication type:

Article

Exposition time analysis of AlGaN/GaN HEMT fabrication by electron beam lithography.

Published in:

Optica Applicata, 2019, v. 49, n. 1, p. 161, doi. 10.5277/oa190114

By:

INDYKIEWICZ, KORNELIA;
PASZKIEWICZ, BOGDAN;
PASZKIEWICZ, REGINA

Publication type:

Article

Improvement of the electron beam lithography contact pads fabrication process.

Published in:

Optica Applicata, 2016, v. 46, n. 2, p. 249, doi. 10.5277/oa160209

By:

INDYKIEWICZ, KORNELIA;
PASZKIEWICZ, REGINA;
PASZKIEWICZ, BOGDAN

Publication type:

Article

Geometrical and electronic properties of ultra thin epitaxial metal nanowires on flat and vicinal Si surfaces.

Published in:

Materials Science (0137-1339), 2005, v. 23, n. 4, p. 861

By:

PFNÜR, H.;
ZIELASEK, V.;
TEGENKAMP, CH.;
BLOCK, T.;
KALLASSY, Z.

Publication type:

Article

Acid-Stable Peroxoniobophosphate Clusters To Make Patterned Films.

Published in:

Chemistry - A European Journal, 2015, v. 21, n. 18, p. 6727, doi. 10.1002/chem.201500684

By:

Son, Jung ‐ Ho;
Park, Deok ‐ Hie;
Keszler, Douglas A.;
Casey, William H.

Publication type:

Article

Plasmonic loss compensation in nanowires embedded in rhodamine doped PMMA waveguides.

Published in:

Optical & Quantum Electronics, 2023, v. 55, n. 12, p. 1, doi. 10.1007/s11082-023-05367-7

By:

Zyapkov, Anton;
Tzonev, Atanas

Publication type:

Article

Surface plasmons and SERS application of Au nanodisk array and Au thin film composite structure.

Published in:

Optical & Quantum Electronics, 2020, v. 52, n. 5, p. 1, doi. 10.1007/s11082-020-02360-2

By:

Wang, Xiangxian;
Wu, Yuan;
Wen, Xiaolei;
Zhu, Jiankai;
Bai, Xuelin;
Qi, Yunping;
Yang, Hua

Publication type:

Article

Hydrogen sulfide alleviates oxidative stress injury and reduces apoptosis induced by MPP+ in Parkinson's disease cell model.

Published in:

Molecular & Cellular Biochemistry, 2020, v. 472, n. 1/2, p. 231, doi. 10.1007/s11010-020-03801-y

By:

Liu, Lin;
Wang, Jin;
Wang, Heng

Publication type:

Article

A review: research progress of chemical–mechanical polishing slurry for copper interconnection of integrated circuits.

Published in:

International Journal of Advanced Manufacturing Technology, 2023, v. 125, n. 1/2, p. 47, doi. 10.1007/s00170-022-10775-2

By:

Yan, Han;
Niu, Xinhuan;
Qu, Minghui;
Luo, Fu;
Zhan, Ni;
Liu, Jianghao;
Zou, Yida

Publication type:

Article

纳米流体通道的制备及其应用研究进展.

Published in:

Journal of Materials Engineering / Cailiao Gongcheng, 2022, v. 50, n. 12, p. 13, doi. 10.11868/j.issn.1001-4381.2022.000153

By:

宋光辉;
吴忠旋;
陈阁谷;
彭锋

Publication type:

Article

Reflection Spectra of Microarrays of Silicon Nanopillars.

Published in:

Optics & Spectroscopy, 2018, v. 124, n. 5, p. 730, doi. 10.1134/S0030400X1805003X

By:

Basalaeva, L. S.;
Nastaushev, Yu. V.;
Dultsev, F. N.;
Kryzhanovskaya, N. V.;
Moiseev, E. I.

Publication type:

Article

Lithography Alignment Techniques Based on Moiré Fringe.

Published in:

Photonics, 2023, v. 10, n. 4, p. 351, doi. 10.3390/photonics10040351

By:

Jiang, Wenbo;
Wang, Huaran;
Xie, Wenda;
Qu, Zhefei

Publication type:

Article

Plasmonic Surface Lattice Resonances in Suspended Symmetric Double-Layer Gratings.

Published in:

Photonics, 2022, v. 9, n. 12, p. 890, doi. 10.3390/photonics9120890

By:

Cen, Mengjia;
Wang, Jiawei;
Liu, Jianxun;
Li, Ye;
Cai, Wenfeng;
Kong, Delai;
Luo, Dan;
Cao, Tun;
Liu, Yan Jun

Publication type:

Article

Miniaturized beamsplitters realized by X-ray waveguides.

Published in:

Acta Crystallographica. Section A, Foundations & Advances, 2016, v. 72, n. 5, p. 515, doi. 10.1107/S205327331601144X

By:

Hoffmann-Urlaub, Sarah;
Salditt, Tim

Publication type:

Article

Features of resist-free formation of masking pattern by electron beam-induced vapor deposition.

Published in:

High Energy Chemistry, 2008, v. 42, n. 5, p. 360, doi. 10.1134/S0018143908050056

By:

Bruk, M.;
Zhikharev, E.;
Shevchuk, S.;
Volegova, I.;
Spirin, A.;
Teleshov, E.;
Kal’nov, V.;
Maishev, Yu.

Publication type:

Article

ELECTRON BEAM LITHOGRAPHY PROCESS QUALITY IMPROVEMENT BY ROBUST ENGINEERING APPROACH.

Published in:

Journal of Chemical Technology & Metallurgy, 2024, v. 59, n. 2, p. 439, doi. 10.59957/jctm.v59.i2.2024.24

By:

Koleva, Lilyana;
Asenova-Robinzonova, Asya;
Koleva, Elena

Publication type:

Article

Modelling, characterization, and applications of silicon on insulator loop terminated asymmetric Mach Zehnder interferometer.

Published in:

Scientific Reports, 2022, v. 12, n. 1, p. 1, doi. 10.1038/s41598-022-07449-0

By:

El Shamy, Raghi S.;
Afifi, Abdelrahman E.;
Badr, Mohamed M.;
Swillam, Mohamed A.

Publication type:

Article

Wafer scale manufacturing of high precision micro-optical components through X-ray lithography yielding 1800 Gray Levels in a fingertip sized chip.

Published in:

Scientific Reports, 2022, v. 12, n. 1, p. 1, doi. 10.1038/s41598-022-06688-5

By:

Kalaiselvi, S. M. P.;
Tang, E. X.;
Moser, H. O.;
Breese, M. B. H.;
Turaga, S. P.;
Kasi, H.;
Heussler, S. P.

Publication type:

Article

A millisecond passive micromixer with low flow rate, low sample consumption and easy fabrication.

Published in:

Scientific Reports, 2021, v. 11, n. 1, p. 1, doi. 10.1038/s41598-021-99471-x

By:

Liao, Yuanyuan;
Mechulam, Yves;
Lassalle-Kaiser, Benedikt

Publication type:

Article

IoT device fabrication using roll-to-roll printing process.

Published in:

Scientific Reports, 2021, v. 11, n. 1, p. 1, doi. 10.1038/s41598-021-99436-0

By:

Phung, Thanh Huy;
Gafurov, Anton Nailevich;
Kim, Inyoung;
Kim, Sung Yong;
Kim, Kyoung Min;
Lee, Taik-Min

Publication type:

Article

Geometrical dependence of optical negative index meta-materials at 1.55 μm.

Published in:

Applied Physics A: Materials Science & Processing, 2009, v. 95, n. 4, p. 1119, doi. 10.1007/s00339-009-5139-9

By:

Wu, Wei;
Ponizovskaya, Ekaterina;
Kim, Evgenia;
Cho, David;
Bratkovsky, Alexander;
Yu, Zhaoning;
Xia, Qiangfei;
Li, Xuema;
Shen, Y. Ron;
Wang, S. Y.;
Williams, R. Stanley

Publication type:

Article

Inscription of fiber Bragg gratings with femtosecond pulses using a phase mask scanning technique.

Published in:

Applied Physics A: Materials Science & Processing, 2006, v. 86, n. 2, p. 153, doi. 10.1007/s00339-006-3754-2

By:

Thomas, J.;
Wikszak, E.;
Clausnitzer, T.;
Fuchs, U.;
Zeitner, U.;
Nolte, S.;
Tünnermann, A.

Publication type:

Article