Works matching DE "PLASMA etching"
Results: 738
Flexible and Highly Sensitive Pressure Sensors with Surface Discrete Microdomes Made from Self‐Assembled Polymer Microspheres Array.
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- Macromolecular Chemistry & Physics, 2020, v. 221, n. 11, p. 1, doi. 10.1002/macp.202000073
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- Article
Subwavelength Etched Colloidal Monolayers: A Model System for Tunable Antireflective Coatings.
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- Macromolecular Chemistry & Physics, 2015, v. 216, n. 16, p. 1682, doi. 10.1002/macp.201500167
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Large‐Area Uniaxially Oriented Sub‐5 nm Line Patterns of Hybrid Liquid Crystals Constructed by Perylene Diimide and Oligo(Dimethylsiloxane).
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- Chemistry - A European Journal, 2023, v. 29, n. 18, p. 1, doi. 10.1002/chem.202203702
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- Article
Universal Platform for Scalable Semiconductor‐Superconductor Nanowire Networks.
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- Advanced Functional Materials, 2021, v. 31, n. 38, p. 1, doi. 10.1002/adfm.202103062
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- Article
Morphology and mechanical properties of polypropylene micro-arrays by micro-injection molding.
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- International Journal of Advanced Manufacturing Technology, 2009, v. 40, n. 5/6, p. 490, doi. 10.1007/s00170-007-1364-6
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- Article
耐等离子体刻蚀涂层材料与制备工艺研究进展.
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- Nonferrous Metals Engineering, 2024, v. 14, n. 12, p. 39, doi. 10.3969/j.issn.20951744.2024.12.005
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- Article
软质聚氯乙烯电缆材料的抗老化与 耐腐蚀性能研究.
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- Plastics Science & Technology / Suliao Ke-Ji, 2023, v. 51, n. 5, p. 62, doi. 10.15925/j.cnki.issn1005-3360.2023.05.013
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- Article
Photoelectrocatalytic Reduction of Nitrobenzene to Azobenzene by Using Ag Nanoparticles‐Decorated Si Nanocone Arrays Photocathodes.
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- ChemPhotoChem, 2024, v. 8, n. 11, p. 1, doi. 10.1002/cptc.202400099
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- Article
Contact Resistivity in Edge‐Contacted Graphene Field Effect Transistors.
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- Advanced Electronic Materials, 2022, v. 8, n. 5, p. 1, doi. 10.1002/aelm.202101169
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- Article
Argon–Oxygen Ion-Plasma Treatment Modifies the Surface Composition and Photoluminescence Spectrum of Porous Silicon.
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- Technical Physics Letters, 2000, v. 26, n. 10, p. 919, doi. 10.1134/1.1321239
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- Article
Dry etching of aluminum nitride by an ion beam.
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- Technical Physics Letters, 1997, v. 23, n. 6, p. 454, doi. 10.1134/1.1261712
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- Article
Micro-3D sculptured metastructures with deep trenches for sub-10 μm resolution.
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- Microsystems & Nanoengineering, 2025, v. 11, n. 1, p. 1, doi. 10.1038/s41378-025-00888-5
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- Article
Neuronal activity in the ventral tegmental area during goal-directed navigation recorded by low-curvature microelectrode arrays.
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- Microsystems & Nanoengineering, 2024, v. 10, n. 1, p. 1, doi. 10.1038/s41378-024-00778-2
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- Article
تأثيخ نافث البالزما حاجد العدل على أنبات سبعة أصشاف من نبات البخوكلي.
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- College of Basic Education Researches Journal, 2021, v. 17, n. 3, p. 1336
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- Article
Road map for, and technical challenges of, carbon-nanotube integrated circuit technology.
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- National Science Review, 2024, v. 11, n. 3, p. 1, doi. 10.1093/nsr/nwad261
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- Article
Tunable nanopillar array on a quartz-fiber tip for surface enhanced Raman scattering (SERS) detection.
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- Technisches Messen, 2022, v. 89, n. 1, p. 70, doi. 10.1515/teme-2021-0093
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- Article
Ultrahigh GaN:SiO<sub>2</sub> etch selectivity by in situ surface modification of SiO<sub>2</sub> in a Cl<sub>2</sub>-Ar plasma.
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- 2021
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- Report
Pd/Alumina Catalysts for Beneficial Transformation of Harmful Freon R-22.
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- Catalysts (2073-4344), 2021, v. 11, n. 10, p. 1178, doi. 10.3390/catal11101178
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- Article
Sc<sub>2</sub>O<sub>3</sub> on sapphire all-crystalline grating–waveguide resonant reflectors.
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- Applied Physics B: Lasers & Optics, 2023, v. 129, n. 5, p. 1, doi. 10.1007/s00340-023-08009-8
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- Article
Design and fabrication of antireflective GaN subwavelength grating structures using periodic silica sphere monolayer array patterning.
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- Applied Physics B: Lasers & Optics, 2013, v. 113, n. 4, p. 567, doi. 10.1007/s00340-013-5511-5
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- Article
Combination of ion beam stabilisation, plasma etching and plasma deposition for the development of tissue engineering micropatterned supports.
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- Journal of Biomaterials Science -- Polymer Edition, 2004, v. 15, n. 2, p. 161, doi. 10.1163/156856204322793557
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- Article
Annealing Process on Metal–Oxide–Semiconductor Channel Properties for Quasivertical GaN‐on‐Sapphire Trench Metal–Oxide–Semiconductor Field‐Effect Transistor.
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- Physica Status Solidi - Rapid Research Letters, 2024, v. 18, n. 11, p. 1, doi. 10.1002/pssr.202400075
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- Article
Control of Surface Chemistry in Recess Etching toward Normally Off GaN Metal–Insulator–Semiconductor High‐Electron‐Mobility Transistors.
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- Physica Status Solidi - Rapid Research Letters, 2024, v. 18, n. 9, p. 1, doi. 10.1002/pssr.202400091
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- Article
Preferential MBE Growth and Characterization of SiGe Nanoislands on Depth-Selective Si Pits Etched by Ar<sup>+</sup> Plasma.
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- Physica Status Solidi - Rapid Research Letters, 2018, v. 12, n. 5, p. 1, doi. 10.1002/pssr.201700424
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- Article
Passivation of Phosphorus Diffused Black Multi-Crystalline Silicon by Hafnium Oxide.
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- Physica Status Solidi - Rapid Research Letters, 2017, v. 11, n. 12, p. n/a, doi. 10.1002/pssr.201700296
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- Article
EFFECTS OF EDGE ROUGHNESS ON SURFACE CHARGING IN PLASMA ETCHING.
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- Surface Review & Letters, 2023, v. 30, n. 11, p. 1, doi. 10.1142/S0218625X23500798
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- Article
Graphene In Situ Coated High-Oxygen Vacancy Co3O4−x Sphere Composites for High-Stability Supercapacitors.
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- Arabian Journal for Science & Engineering (Springer Science & Business Media B.V. ), 2020, v. 45, n. 6, p. 4809, doi. 10.1007/s13369-020-04337-5
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- Article
Hydrogel-Assisted 3D Volumetric Hotspot for Sensitive Detection by Surface-Enhanced Raman Spectroscopy.
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- International Journal of Molecular Sciences, 2022, v. 23, n. 2, p. 1004, doi. 10.3390/ijms23021004
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- Article
Correlation of Plasma Erosion Resistance and the Microstructure of YF3 Coatings Prepared by Vacuum Kinetic Spray.
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- Journal of Thermal Spray Technology, 2020, v. 29, n. 5, p. 1016, doi. 10.1007/s11666-020-01019-4
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- Article
Modulated Ar/CH<sub>4</sub> Plasma by Metal Shield for Enhancing the PECVD Growth of Vertical Graphene.
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- International Journal of Nanoscience, 2022, v. 21, n. 4, p. 1, doi. 10.1142/S0219581X22500235
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- Article
NANOSCALE ARRAYS IN LITHIUM NIOBATE FABRICATED BY INTERFERENCE LITHOGRAPHY AND DRY ETCHING.
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- International Journal of Nanoscience, 2010, v. 9, n. 4, p. 311, doi. 10.1142/S0219581X10006867
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- Article
DIRECT IMPRINTING OF SiO<sub>2</sub> WAVEGUIDE STRUCTURES ON GaAs AND ITS APPLICATION IN InAs/GaAs QUANTUM DOT INTERMIXING.
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- International Journal of Nanoscience, 2009, v. 8, n. 1/2, p. 107, doi. 10.1142/S0219581X09005839
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- Article
NANOTIPS COLD-END CONTACT FOR MICROCOOLING SYSTEMS.
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- International Journal of Nanoscience, 2005, v. 4, n. 4, p. 701, doi. 10.1142/S0219581X05003723
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- Article
Internal Structure Tailoring in 3D Nanoplasmonic Metasurface for Surface‐Enhanced Raman Spectroscopy.
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- Particle & Particle Systems Characterization, 2020, v. 37, n. 1, p. N.PAG, doi. 10.1002/ppsc.201900345
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- Article
Synthesis of mesoporous titania thin films by a simple route at low-temperature via plasma treatment.
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- Journal of Materials Science, 2013, v. 48, n. 11, p. 4088, doi. 10.1007/s10853-013-7221-0
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- Article
Plasma Etching in InAlN/GaN Hemt Technology.
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- Russian Physics Journal, 2020, v. 63, n. 1, p. 94, doi. 10.1007/s11182-020-02006-6
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- Article
N-GaN column arrays on the vertical InGaN/GaN blue LEDs formed by maskless dry etching.
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- Crystal Research & Technology, 2014, v. 49, n. 2/3, p. 116, doi. 10.1002/crat.201300316
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- Article
Microembossed copper microchannel heat sink for high-density cooling in electronics.
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- Micro & Nano Letters (Wiley-Blackwell), 2019, v. 14, n. 12, p. 1258, doi. 10.1049/mnl.2019.0198
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- Article
Metal-assisted chemical etching for realisation of deep silicon microstructures.
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- Micro & Nano Letters (Wiley-Blackwell), 2019, v. 14, n. 10, p. 1083, doi. 10.1049/mnl.2019.0113
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- Article
Inductively coupled CH<sub>4</sub>/H<sub>2</sub> plasma etching process for mesa delineation of InAs/GaSb type-II superlattice pixels.
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- Micro & Nano Letters (Wiley-Blackwell), 2019, v. 14, n. 7, p. 753, doi. 10.1049/mnl.2018.5549
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- Article
Vacuum-free photolithographic patterning of conducting polymer film.
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- Micro & Nano Letters (Wiley-Blackwell), 2016, v. 11, n. 12, p. 807, doi. 10.1049/mnl.2016.0479
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- Article
Fine-pitch through-silicon via integration with self-aligned back-side benzocyclobutene passivation layer.
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- Micro & Nano Letters (Wiley-Blackwell), 2016, v. 11, n. 10, p. 619, doi. 10.1049/mnl.2016.0267
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- Article
Development of thin quartz glass utilising through-glass-via (TGV) formation by dry etching technology.
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- Micro & Nano Letters (Wiley-Blackwell), 2016, v. 11, n. 10, p. 568, doi. 10.1049/mnl.2016.0242
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- Article
Aligned 1D silicon nanostructure arrays by plasma etching
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- Science & Technology of Advanced Materials, 2005, v. 6, n. 7, p. 804, doi. 10.1016/j.stam.2005.05.015
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- Article
THROMBORESISTANT SILICON PLATES MODIFIED WITH CHITOSAN AND HEPARIN BY THE LAYER-BY-LAYER ASSEMBLY METHOD.
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- Progress on Chemistry & Application of Chitin & its Derivatives, 2019, v. 24, p. 5, doi. 10.15259/PCACD.24.001
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- Article
Plasma etching of cavities into diamond anvils for experiments at high pressures and high temperatures.
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- High Pressure Research, 2011, v. 31, n. 1, p. 191, doi. 10.1080/08957959.2011.557073
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- Article
Study of Schottky Diodes Based on an Array of Silicon Wires Obtained by Cryogenic Dry Etching.
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- Technical Physics Letters, 2022, v. 48, n. 2, p. 23, doi. 10.1134/S106378502202002X
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- Article
High-Performance, Reproducible Tip-Enhanced Raman Scattering Probes.
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- Technical Physics Letters, 2020, v. 46, n. 11, p. 1084, doi. 10.1134/S1063785020110103
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- Article
Autoemission of Multipointed Cathode Matrices Based on p-Type Silicon in Strong Pulsed Electric Fields.
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- Technical Physics Letters, 2019, v. 45, n. 5, p. 423, doi. 10.1134/S106378501905016X
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- Article
Low-Energy Defectless Dry Etching of the AlGaN/AlN/GaN HEMT Barrier Layer.
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- Technical Physics Letters, 2018, v. 44, n. 5, p. 435, doi. 10.1134/S1063785018050218
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- Article