Works matching DE "PROCESS control systems"


Results: 3932
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    Measurement of plasmas.

    Published in:
    Solid State Technology, 2001, v. 44, n. 11, p. 91
    By:
    • Scanlan, John;
    • Bowker, Chris
    Publication type:
    Article
    22

    APC for plasma etch.

    Published in:
    Solid State Technology, 2001, v. 44, n. 10, p. 71
    By:
    • Tegeder, Volker;
    • Ronchi, Robert;
    • Muezler, Sven;
    • Hofmann, Mathias
    Publication type:
    Article
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    Technology vision.

    Published in:
    Surface Engineering, 2011, v. 27, n. 8, p. 557, doi. 10.1179/174329411X13092681464923
    By:
    • Smurov, Igor;
    • Ulianitsky, Vladimir
    Publication type:
    Article
    47

    Guest Editorial.

    Published in:
    Surface Engineering, 2004, v. 20, n. 3, p. 153, doi. 10.1179/026708404225015059
    By:
    • Kelly, Peter
    Publication type:
    Article
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