RF transmission line of a 2.45 GHz ECR ion source.

Aghbolaghi, Marzieh Asadi; Davani, Fereydoun Abbasi; Satri, Masoomeh Yarmohammadi; Mobaraki, Zafar Riazi; Ghasemi, Farshad

Microwave coupling plays an important role to energize the electrons in an electron cyclotron resonance ion source (ECRIS) plasma. Several components are hired for wave transition from a magnetron to the ECR plasma chamber. In this work, DC break, pressure window, ridged waveguide and plasma chamber have been designed and simulated by COMSOL Multiphysics to transmit the microwave power. The power and frequency are 1 kW and 2.45 GHz, respectively. The results show the TE111 mode gets excited and 9.9 mm quartz pressure window maximize the forward transmission power to the cavity. The DC break is based on utilizing the insulating rings along the WR-284 waveguide, which has low wave return loss for a wide range of frequencies. A four-ridged waveguide is considered for impedance matching and electric field focusing. The amplification of the electric field in the middle of cylindrical plasma chamber is satisfied with dimensions of 09 cm x 10 cm.

MICROWAVES; ELECTRONS; MAGNETRON sputtering; ELECTRIC fields; LASER plasmas

Radiation Physics & Engineering, 2025, Vol 6, Issue 1, p59

2645-6397

Academic Journal

10.22034/rpe.2024.471148.1230