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- Title
Direct synthesized graphene-like film on SiO<sub>2</sub>: Mechanical and optical properties.
- Authors
Bortchagovsky, E. G.; Vasin, A. V.; Lytvyn, P. M.; Tiagulskyi, S. I.; Slobodian, A. M.; Verovsky, I. N.; Strelchuk, V. V.; Stubrov, Yu.; Nazarov, A. N.
- Abstract
Exploiting CVD technique for carbon deposition from C2H2 H2 N2 mixture, a graphene-like film synthesized directly on SiO2 surface of SiO2-Si structure was obtained. The graphene-like film was grown under thin Ni layer that is easy exfoliated from graphene-SiO2-Si structure. Surface of the film was sufficiently smooth and reveals no winkles and holes; it has a good homogeneity and perfect adhesion to SiO2 layer. Studying the micro-Raman spectra showed a graphene-like structure of the film; using atomic force microscopic technique, the thickness of film was determined (0.6 nm). Using spectroscopic ellipsometry and simple Cauchy model enabled us to estimate optical parameters of this graphene-like film.
- Subjects
GRAPHENE synthesis; METALLIC films; SILICA; MECHANICAL properties of metals; OPTICAL properties of metals; CHEMICAL vapor deposition; CARBON
- Publication
Semiconductor Physics, Quantum Electronics & Optoelectronics, 2016, Vol 19, Issue 4, p328
- ISSN
1560-8034
- Publication type
Academic Journal
- DOI
10.15407/spqeo19.04.328