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Title

Influence of traps in gate oxide-Si film transition layers on FD MOSFET's characteristics at cryogenic temperatures.

Authors

Lysenko, V. S.; Tyagulsky, I. P.; Osiyuk, I. N.; Nazarov, A. N.

Abstract

The results of experiments on the influence of recharging the electron traps in a Si-SiO2 transition layer on the low-temperature characteristics of fully depleted silicon in insulator MOSFET devices are presented. It is shown that the low-dose gammaradiation improves electrophysical parameters of the transition layer.

Subjects

SILICON; ELECTRONS; GAMMA rays; LOW temperatures; TRANSITION temperature

Publication

Semiconductor Physics, Quantum Electronics & Optoelectronics, 2007, Vol 10, Issue 2, p34

ISSN

1560-8034

Publication type

Academic Journal

DOI

10.15407/spqeo10.02.034

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