Works matching IS 21928576 AND DT 2015 AND VI 4 AND IP 4

Results: 13
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    Performance of 100-W HVM LPP-EUV source.

    Published in:
    Advanced Optical Technologies, 2015, v. 4, n. 4, p. 297, doi. 10.1515/aot-2015-0025
    By:
    • Mizoguchi, Hakaru;
    • Nakarai, Hiroaki;
    • Abe, Tamotsu;
    • Nowak, Krzysztof M.;
    • Kawasuji, Yasufumi;
    • Tanaka, Hiroshi;
    • Watanabe, Yukio;
    • Hori, Tsukasa;
    • Kodama, Takeshi;
    • Shiraishi, Yutaka;
    • Yanagida, Tatsuya;
    • Soumagne, Georg;
    • Yamada, Tsuyoshi;
    • Yamazaki, Taku;
    • Okazaki, Shinji;
    • Saitou, Takashi
    Publication type:
    Article
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    Cover and Frontmatter.

    Published in:
    Advanced Optical Technologies, 2015, v. 4, n. 4, p. i, doi. 10.1515/aot-2015-frontmatter4
    Publication type:
    Article
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    Conference Calendar.

    Published in:
    Advanced Optical Technologies, 2015, v. 4, n. 4, p. 247, doi. 10.1515/aot-2015-0037
    Publication type:
    Article
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    Conference Notes.

    Published in:
    Advanced Optical Technologies, 2015, v. 4, n. 4, p. 243, doi. 10.1515/aot-2015-0040
    Publication type:
    Article
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